The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Sep. 04, 2009
Timothy John Maykut, Bethlehem, PA (US);
Suhas Narayan Ketkar, Allentown, PA (US);
Benjamin James Arthur Inman, Basingstoke, GB;
John Irven, Somerset, GB;
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Neil Alexander Downie, Hampshire, GB;
Timothy John Maykut, Bethlehem, PA (US);
Suhas Narayan Ketkar, Allentown, PA (US);
Benjamin James Arthur Inman, Basingstoke, GB;
John Irven, Somerset, GB;
Eugene Joseph Karwacki, Jr., Orefield, PA (US);
Neil Alexander Downie, Hampshire, GB;
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million ('ppm'), or 10 ppm, or 1 ppm, or 100 parts per billion ('ppb'), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20° C. to −50° C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from −50° C. to 30° C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.