The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2012
Filed:
Dec. 21, 2007
Jennifer Y. Sun, Sunnyvale, CA (US);
LI Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Thomas Graves, Los Altos, CA (US);
Ren-guan Duan, Fremont, CA (US);
Senh Thach, Union City, CA (US);
Jennifer Y. Sun, Sunnyvale, CA (US);
Li Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Thomas Graves, Los Altos, CA (US);
Ren-Guan Duan, Fremont, CA (US);
Senh Thach, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An article which is resistant to corrosion or erosion by chemically active plasmas and a method of making the article are described. The article is comprised of a metal or metal alloy substrate having on its surface a coating which is an oxide of the metal or metal alloy. The structure of the oxide coating is columnar in nature. The grain size of the crystals which make up the oxide is larger at the surface of the oxide coating than at the interface between the oxide coating and the metal or metal alloy substrate, and wherein the oxide coating is in compression at the interface between the oxide coating and the metal or metal alloy substrate. Typically the metal is selected from the group consisting of yttrium, neodymium, samarium, terbium, dysprosium, erbium, ytterbium, scandium, hafnium, niobium or combinations thereof.