The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Dec. 11, 2008
Peter DE Groot, Middletown, CT (US);
Xavier Colonna DE Lega, Middlefield, CT (US);
Peter De Groot, Middletown, CT (US);
Xavier Colonna De Lega, Middlefield, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
A method includes comparing a scanning interferometry signal obtained for a location of a test object to each of multiple model signals corresponding to different model parameters for modeling the test object, wherein for each model signal the comparing includes calculating a correlation function between the scanning interferometry signal and the model signal to identify a surface-height offset between the scanning interferometry signal and the model signal and, based on the identified surface-height offset, calculating a height-offset compensated merit value indicative of a similarity between the scanning interferometry signal and the model signal for a common surface height. The method further includes, based on the respective merit values for the different model signals, determining a test object parameter at the location of the test object.