The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Nov. 05, 2007
Jürgen Döpping, Freiberg, DE;
Matthias Reinecke, Pesterwitz, DE;
Holger Brosche, Dresden, DE;
Hans-joachim Gretzschel, Dresden, DE;
Steffen Pollack, Dresden, DE;
Jürgen Döpping, Freiberg, DE;
Matthias Reinecke, Pesterwitz, DE;
Holger Brosche, Dresden, DE;
Hans-Joachim Gretzschel, Dresden, DE;
Steffen Pollack, Dresden, DE;
Deutsche Solar GmbH, Freiberg, DE;
Abstract
The invention relates to a device for manufacturing semiconductor material wafers with a sawing device for the sawing of slices attached to a saw holder, a pre-cleaning device arranged in the process direction downstream of the sawing device for pre-cleaning the surfaces of the slices hanging on the saw holder, and a degluing device arranged downstream in the process direction for detaching the slices from the saw holder.