The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Nov. 10, 2009
Applicant:
Daisuke Kawamura, Kanagawa, JP;
Inventor:
Daisuke Kawamura, Kanagawa, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B05C 5/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including:
Kawamura, Daisuke. (2012). Film forming apparatus, manufacturing management system and method of manufacturing semiconductor devices (U.S. Patent No. 8122848). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8122848
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile