The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2012
Filed:
Jul. 24, 2009
Jan Liesener, Middletown, CT (US);
Mark Davidson, Palo Alto, CA (US);
Peter J DE Groot, Middletown, CT (US);
Xavier Colonna DE Lega, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Jan Liesener, Middletown, CT (US);
Mark Davidson, Palo Alto, CA (US);
Peter J De Groot, Middletown, CT (US);
Xavier Colonna De Lega, Middlefield, CT (US);
Leslie L. Deck, Middletown, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.