The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2012
Filed:
Apr. 14, 2008
Toyoaki Nakajima, Chigasaki, JP;
Yujirou Kurokawa, Chigasaki, JP;
Tsutomu Yuri, Chigasaki, JP;
Ryota Tanaka, Chigasaki, JP;
Jiro Endo, Chigasaki, JP;
Hitomi Obise, Chigasaki, JP;
Toyoaki Nakajima, Chigasaki, JP;
Yujirou Kurokawa, Chigasaki, JP;
Tsutomu Yuri, Chigasaki, JP;
Ryota Tanaka, Chigasaki, JP;
Jiro Endo, Chigasaki, JP;
Hitomi Obise, Chigasaki, JP;
ULVAC, Inc., Chigasaki-Shi, JP;
Abstract
A method of controlling a mass spectrometer comprises the steps of: supplying a current to a cathode electrode of an ion source having the cathode electrode and an anode electrode, and ionizing a molecules of a gas to be measured; selecting ions generated in the ion source by mass-to-charge ratio; and detecting an ion current value of the selected ions. When a partial pressure of the gas to be measured is measured based on a detection result of the ion current value, a cathode current is supplied to the cathode electrode such that an emission current flowing between the cathode electrode and the anode electrode becomes constant. When a partial pressure of the gas to be measured is not measured, a constant current having a current value less than that of the cathode current is supplied to the cathode electrode.