The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Sep. 26, 2008
Steven B. Herschbein, Hopewell Junction, NY (US);
Ronald C. Geiger, Jr., Lagrangeville, NY (US);
George Y. Gu, Burlington, MA (US);
Oleg Gluschenkov, Poughkeepsie, NY (US);
Xu Ouyang, Hopewell Junction, NY (US);
Steven B. Herschbein, Hopewell Junction, NY (US);
Ronald C. Geiger, Jr., Lagrangeville, NY (US);
George Y. Gu, Burlington, MA (US);
Oleg Gluschenkov, Poughkeepsie, NY (US);
Xu Ouyang, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system and method for failure analysis of devices on a semiconductor wafer is disclosed. The present invention comprises the use of an inline focused ion beam milling tool to perform milling and image capturing of cross sections of a desired inspection point. The inspection points are located by identifying at least one fiducial that corresponds to an X-Y offset from the desired inspection point. The fiducials are recognized by a computer vision system. By automating the inspection process, the time required to perform the inspections is greatly reduced.