The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Nov. 14, 2005
Applicants:
Genji Inada, Kawasaki, JP;
Junichiro Iri, Yokohama, JP;
Masayuki Nishiwaki, Yoshikawa, JP;
Sadayuki Sugama, Tsukuba, JP;
Inventors:
Genji Inada, Kawasaki, JP;
Junichiro Iri, Yokohama, JP;
Masayuki Nishiwaki, Yoshikawa, JP;
Sadayuki Sugama, Tsukuba, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/78 (2006.01); H01L 21/30 (2006.01); H01L 21/301 (2006.01);
U.S. Cl.
CPC ...
Abstract
At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.