The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 31, 2012

Filed:

Feb. 03, 2010
Applicants:

Yoshimasa Suzuki, Tsukuba, JP;

Kazuhiko Kawasaki, Tsukuba, JP;

Satoshi Koga, Tsukuba, JP;

Inventors:

Yoshimasa Suzuki, Tsukuba, JP;

Kazuhiko Kawasaki, Tsukuba, JP;

Satoshi Koga, Tsukuba, JP;

Assignee:

Mitutoyo Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 12/16 (2006.01); G01Q 20/02 (2010.01); G01B 7/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

A probe microscope includes a cantilever having a probe, a displacement detecting optical system, an observation optical system, an objective lens, and a parallel glass. The displacement detecting optical system includes a first light source and a light detecting element. The observation optical system includes a second light source, an image forming lens, and a camera. The objective lens is disposed between the cantilever and the first and second light sources, and is commonly used by the displacement detecting optical system and the observation optical system. The parallel glass is capable of being inserted and retracted freely between the cantilever and the objective lens to adjust a focal point of the objective lens.


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