The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Apr. 09, 2009
Toshiya Kotani, Tokyo, JP;
Hiromitsu Mashita, Kanagawa, JP;
Kazuhito Kobayashi, Kanagawa, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
A pattern verification method according to an embodiment includes, dividing a pattern data region or a pattern formation region formed based on the pattern data to a plurality of unit regions, calculating a pattern area ratio with respect to each unit region, calculating differences in the amount of the pattern area ratio between each unit region and adjacent unit regions thereto, setting the number or density of measurement point with respect to each unit region to the pattern of the pattern data region or the pattern formation region according to the difference in the amount of pattern area ratio, measuring the pattern size at each measurement point, and verifying whether the size measurement value is within a predetermined range or not.