The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2012
Filed:
Apr. 26, 2011
Robert O'donnell, Fremont, CA (US);
Eric Lenz, Pleasanton, CA (US);
Mark Wilcoxson, Oakland, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Alexander A. Yatskar, Sunnyvale, CA (US);
Robert O'Donnell, Fremont, CA (US);
Eric Lenz, Pleasanton, CA (US);
Mark Wilcoxson, Oakland, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Alexander A. Yatskar, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A carrier for supporting a substrate during processing by a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening. The opening is slightly larger than the substrate such that a gap exists between the substrate and the opening. Means for reducing a size and frequency of entrance and/or exit marks on substrates is provided, the means aiding and encouraging liquid from the meniscus to evacuate the gap. A method for reducing the size and frequency of entrance and exit marks is also provided.