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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8102500 B1

PDFFull Text
Expired
Date of Patent:
Jan. 24, 2012

Filed:

May. 21, 2007

Stage device, exposure apparatus, and microdevice manufacturing method

Applicants:

Hitoshi Sato, Utsunomiya, JP;

Yasuhito Sasaki, Utsunomiya, JP;

Keiji Emoto, Utsunomiya, JP;

Inventors:

Hitoshi Sato, Utsunomiya, JP;

Yasuhito Sasaki, Utsunomiya, JP;

Keiji Emoto, Utsunomiya, JP;

Assignee:

Canon Kabushiki Kaisha, Tokyo, JP;

Attorney:

Fitzpatrick, Cella, Harper & Scinto

Primary Examiner:

Hung Henry Nguyen

Assistant Examiner:

Colin Kreutzer

Int. Cl.
CPC ...
G03B 27/32 (2006.01); G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/58 (2006.01); G03B 27/62 (2006.01); H01B 7/295 (2006.01); H02K 41/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.

Find Patent Forward Citations

Sato, Hitoshi. (2012). Stage device, exposure apparatus, and microdevice manufacturing method (U.S. Patent No. 8102500). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8102500

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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