The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2012
Filed:
May. 06, 2009
Applicants:
Rand Conner, Chandler, AZ (US);
Ravinder K. Aggarwal, Gilbert, AZ (US);
Inventors:
Rand Conner, Chandler, AZ (US);
Ravinder K. Aggarwal, Gilbert, AZ (US);
Assignee:
ASM America, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 7/02 (2006.01); G01K 1/00 (2006.01); H01L 35/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A thermocouple having at least one inner alignment feature or at least one outer alignment feature, or a combination thereof for positively positioning and aligning at least one thermocouple junction within a bore formed in a susceptor ring of a semiconductor substrate processing reactor. The outer alignment feature is configured to positively align the junction(s) longitudinally within the bore. The inner alignment feature configured to positively position the junction(s) rotationally within the sheath of the thermocouple relative to the bore.
Published as:
US2010284438A1; WO2010129431A2; WO2010129431A3; TW201115126A; US8100583B2; CN102439712A; CN102439712B; TWI480527B;