The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 2012
Filed:
Feb. 25, 2010
Yasuzo Tanaka, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Mitsuru Yahagi, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Shinya Ito, Hidaka, JP;
Yasuzo Tanaka, Chigasaki, JP;
Junpei Yuyama, Chigasaki, JP;
Mitsuru Yahagi, Chigasaki, JP;
Hirofumi Minami, Chigasaki, JP;
Makoto Takahashi, Hidaka, JP;
Shinya Ito, Hidaka, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
A stage apparatus that achieves a high accuracy in assembling and enables easy work at a real installation site. In a stage apparatus of the present invention, sub rails are arranged on respective sub base plates, which are connected respectively with the first and second main rails on a main base plate to extend the first and second main rails. Accordingly, when the sub base plates are fixed to the main base platewith positional alignment performed therebetween, the accuracy in positional alignment of the sub base plates which has already been fixed to the main base plate is not affected.