The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Feb. 24, 2010
Applicants:
Kyoichi Mori, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Inventors:
Kyoichi Mori, Kodama-gun, JP;
Naoaki Yamashita, Kodama-gun, JP;
Noritake Shizawa, Kodama-gun, JP;
Koji Tsushima, Kodama-gun, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A01J 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A fine-structure transfer apparatus includes a stamper, a stage on which to place a transfer element having a coating of resist, and a device for heating the resist coating to be vaporized or a device for supplying a vapor of the resist into a space between the stamper and the transfer element.