The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Sep. 10, 2008
Fan-tien Cheng, Tainan, TW;
Hsien-cheng Huang, Taoyuan, TW;
Yi-ting Huang, Zhongli, TW;
Jia-mau Jian, Kaohsiung, TW;
Fan-Tien Cheng, Tainan, TW;
Hsien-Cheng Huang, Taoyuan, TW;
Yi-Ting Huang, Zhongli, TW;
Jia-Mau Jian, Kaohsiung, TW;
National Cheng Kung University, Tainan, TW;
Abstract
A server, a system and a method for automatic virtual metrology (AVM) are disclosed. The AVM system comprises a model-creation server and a plurality of AVM servers. The model-creation server is used to construct the first set of virtual metrology (VM) models (of a certain equipment type) including a VM conjecture model, a RI (Reliance Index) model, a GSI (Global Similarity Index) model, a DQI(Process Data Quality Index) model, and a DQI(Metrology Data Quality Index) model. In the AVM method, the model-creation server also can fan out or port the first set of VM models generated to other AVM servers of the same process apparatus (equipment) type, and each individual fan-out-acceptor's AVM server can perform automatic model refreshing processes so as to gain and maintain its VM models' accuracy.