The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Mar. 22, 2010
Naoki Watanabe, Kawasaki, JP;
Einstein Noel Abarra, Hachioji, JP;
David Djulianto Djayaprawira, Inagi, JP;
Yasumi Kurematsu, Tokyo, JP;
Naoki Watanabe, Kawasaki, JP;
Einstein Noel Abarra, Hachioji, JP;
David Djulianto Djayaprawira, Inagi, JP;
Yasumi Kurematsu, Tokyo, JP;
Canon Anelva Corporation, Kawasaki-shi, JP;
Abstract
There are comprised a load chamber () for carrying in a wafer from outside, an unload chamber () for carrying out a wafer to outside, and a plurality of conveyance chambers () and a plurality of process modules () connected in series between the load chamber and the unload chamber. The conveyance chambers and the process modules are connected alternately and the plurality of conveyance chambers includes a first end conveyance chamber () connected to the load chamber, a second end conveyance chamber () connected to the unload chamber, and another one or a plurality of intermediate conveyance chambers ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile