The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Oct. 01, 2008
Yi Feng Lee, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-zong Tian, Taichung County, TW;
Tsung-wei Lin, Taoyuan County, TW;
Yi Feng Lee, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-Zong Tian, Taichung County, TW;
Tsung-Wei Lin, Taoyuan County, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A method for predicting cycle time comprises the steps of: collecting a plurality of known sets of data; using a clustering method to classify the known sets of data into a plurality of clusters; using a decision tree method to build a classification rule of the clusters; building a prediction model of each cluster; preparing data predicted set of data; using the classification rule to determine that to which clusters the predicted set of data belongs; and using the prediction model of the cluster to estimate the objective cycle time of the predicted set of data. Therefore, engineers can beforehand know the cycle time that one lot of wafers spend in the forward fabrication process, which helps engineers to properly arrange the following fabrication process of the lot of wafer.