The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Feb. 26, 2008
Kenichi Yamaga, Nirasaki, JP;
Kenichi Yamaga, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention provides a heating apparatus for heating objects to be processed, which can detect a temperature of the objects to be processed with higher precision and accuracy, thereby to achieve higher precision temperature control. A heating apparatusincludes a processing vesselconfigured to contain therein a plurality of objects W to be processed, the objects W including objectstoto be processed for temperature measurement, each objecttohaving each corresponding elastic wave elementto, a heating meansadapted for heating the objects W to be processed, and a holding meansadapted to hold the objects W to be processed. To the processing vessel, a transmitter antennaadapted to transmit an electric wave for measurement toward each elastic wave elementto, and a receiver antennaadapted to receive an electric wave having a frequency corresponding to the temperature and generated from each elastic wave elementtoare provided. A temperature analyzeradapted to obtain the temperature of the wafers W to be processed for temperature measurement is connected with the receiver antenna, and a temperature control unitadapted to control the heating meansis in turn connected with the temperature analyzer