The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Apr. 17, 2009
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Takayoshi Mori, Kawasaki, JP;
Sanae Furuya, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Tsuyoshi Nakamura, Kawasaki, JP;
Takayoshi Mori, Kawasaki, JP;
Sanae Furuya, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A positive resist composition including a base component (A) which exhibits increased solubility in an alkali developing solution under action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) including a polymeric compound (A1) having a structural unit (a0-1) represented by general formula (a0-1) (wherein Rrepresents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; Rrepresents a divalent linking group; and Rrepresents an acid dissociable, dissolution inhibiting group) and a structural unit (a0-2) represented by general formula (a0-2) (wherein Rrepresents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; Rrepresents a branched alkyl group of 3 or more carbon atoms; and each of Rand Rindependently represents an alkyl group, wherein Rand Rare mutually bonded to form a ring).