The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Nov. 29, 2010
Hung Chih Chen, Sunnyvale, CA (US);
Jeonghoon OH, San Jose, CA (US);
Tsz-sin Siu, Santa Clara, CA (US);
Thomas Brezoczky, San Jose, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Jeonghoon Oh, San Jose, CA (US);
Tsz-Sin Siu, Santa Clara, CA (US);
Thomas Brezoczky, San Jose, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A carrier head for chemical mechanical polishing of a substrate includes a base and a flexible membrane extending beneath the base. The flexible membrane includes a central portion with an outer surface providing a substrate receiving surface, a perimeter portion connecting the central portion to the base, and at least one flap extending from an inner surface of the central portion. The flap divides a volume between the flexible membrane and the base into a plurality of chambers, and the flap includes a laterally extending first section and an angled second section extending beneath the first section and connecting the laterally extending first section to the central portion.