The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
Oct. 09, 2008
Jozef Augustinus Maria Alberti, Nederweert, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Frans Erik Groensmit, Helmond, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
Jozef Augustinus Maria Alberti, Nederweert, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Frans Erik Groensmit, Helmond, NL;
Rene Theodorus Petrus Compen, Valkenswaard, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.