The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Jun. 29, 2007
Yoshiki Ashizawa, Pleasanton, CA (US);
Heng-cheng Pal, San Jose, CA (US);
Patrick Ngatchou, Santa Clara, CA (US);
Kurt Weiner, San Jose, CA (US);
John Schmidt, Oakland, CA (US);
Yoshiki Ashizawa, Pleasanton, CA (US);
Heng-Cheng Pal, San Jose, CA (US);
Patrick Ngatchou, Santa Clara, CA (US);
Kurt Weiner, San Jose, CA (US);
John Schmidt, Oakland, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
A method to graphically create a recipe for processing a substrate includes displaying graphical images that present processing operations to be performed on the substrate, allowing a user to set properties of the processing operations by manipulating the graphical images, and generating the recipe based on the properties of the processing operations set by the user and synchronizing the plurality of processing operations based on the properties. The graphical images may be time-bars in a Gantt-like chart that allows the user to see the sequence, the timing, and the durations of the processing operations.