The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2011
Filed:
Jan. 17, 2008
Shahin Zangooie, Hopewell Junction, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Sean D. Burns, Yorktown Heights, NY (US);
Shahin Zangooie, Hopewell Junction, NY (US);
Lin Zhou, LaGrangeville, NY (US);
Sean D. Burns, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A system and method of characterizing a parameter of an ultra thin film, such as a gate oxide layer. A system is disclosed that includes a structure having a pseudo substrate positioned below an ultra thin film, wherein the pseudo substrate includes an optical mirror for enhancing an optical response; and a system for characterizing the ultra thin film by applying a light source to the ultra thin film and analyzing the optical response.