The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Jul. 20, 2008
Michael R. Rice, Pleasanton, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Todd J. Egan, Fremont, CA (US);
Ingrid B. Peterson, Menlo Park, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Todd J. Egan, Fremont, CA (US);
Ingrid B. Peterson, Menlo Park, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).