The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2011

Filed:

Apr. 09, 2008
Applicants:

Ehud Pertzov, Kfar Hess, IL;

Michael Matusovsky, Rishon Lezion, IL;

Yaron Bar-tal, Ganai Tikva, IL;

Ilia Lutsker, Kfar Saba, IL;

Ofer Ish-shalom, Givatayim, IL;

Inventors:

Ehud Pertzov, Kfar Hess, IL;

Michael Matusovsky, Rishon Lezion, IL;

Yaron Bar-Tal, Ganai Tikva, IL;

Ilia Lutsker, Kfar Saba, IL;

Ofer Ish-Shalom, Givatayim, IL;

Assignee:

Orbotech Ltd., Yavne, IL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel rows include at least a first row with first illumination optics including a first array of prisms that are configured to reflect the light emitted by the light sources in the first row, and at least a second row with second illumination optics including a second array of prisms that are configured to refract the light emitted by the light sources in the second row. An imaging assembly is configured to capture an image of the object under illumination by the multiple parallel rows of the light sources.


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