The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Mar. 11, 2009
Tahir Cader, Pullman, WA (US);
Charles Lester Tilton, Colton, WA (US);
Benjamin Hewett Tolman, Moscow, ID (US);
George Joseph Wos, Colton, WA (US);
Alan Brent Roberts, Moscow, ID (US);
Thomas Wong, Menlo Park, CA (US);
Jonathan D. Frank, Los Gatos, CA (US);
Tahir Cader, Pullman, WA (US);
Charles Lester Tilton, Colton, WA (US);
Benjamin Hewett Tolman, Moscow, ID (US);
George Joseph Wos, Colton, WA (US);
Alan Brent Roberts, Moscow, ID (US);
Thomas Wong, Menlo Park, CA (US);
Jonathan D. Frank, Los Gatos, CA (US);
DCG Systems, Inc., Fremont, CA (US);
Isothermal Systems Research, Inc., Clarkston, WA (US);
Abstract
A micro-spray cooling system beneficial for use in testers of electrically stimulated integrated circuit chips is disclosed. The system includes micro-spray heads disposed about a probe head. The spray heads and probe head are disposed in a sealed manner inside a spray chamber that, during operation, is urged in a sealing manner onto a sealing plate holding the integrated circuit under test. The atomized mist cools the integrated circuit and then condenses on the spray chamber wall. The condensed fluid is pumped out of the chamber and is circulated in a chiller, so as to be re-circulated and injected again into the micro-spray heads. The pressure inside the spray chamber may be controlled to provide a desired boiling point.