The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Mar. 31, 2009
Masahiro Koyama, Tsuchiura, JP;
Hironori Ogawa, Hitachinaka, JP;
Nobuo Shibata, Kasumigaura, JP;
Masaru Matsushima, Hitachinaka, JP;
Toshinori Kobayashi, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Masahiro Koyama, Tsuchiura, JP;
Hironori Ogawa, Hitachinaka, JP;
Nobuo Shibata, Kasumigaura, JP;
Masaru Matsushima, Hitachinaka, JP;
Toshinori Kobayashi, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A specimen stage apparatus has a braking structure which can generate a braking force enough to stop a specimen stage while keeping a movable table from increasing in its weight. The specimen stage apparatus has an X guide fixed on an X base and representing a guide structure in X direction, an X table constrained by the X guide to be movable in X direction, an X actuator having its movable part fixed to the X table and an X brake fixed to the X base and representing a braking structure for the X table. A controller carries out positioning control in which it generates a braking force by pushing the X brake against the bottom surface of the X table to stop a specimen stage and turning off the servo-control of the X actuator after stoppage of the specimen stage.