The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Jun. 22, 2007
Josef Sellmair, Freising, DE;
Josef Sellmair, Freising, DE;
CarlZeiss NTS GmbH, Oberkochen, DE;
Abstract
The invention relates to a method and to a device () for producing an image of an object () by means of a particle beam. According to the method and in the device (), the particle beam is scanned by the object (). The aim of the invention is to provide a method and a device for producing an image of an object () by means of a particle beam that can be used with a cold field emitter () in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object () is rescanned preferably with the corrected parameter. The inventive device () comprises the corresponding means () therefor.