The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Feb. 23, 2004
Frank Y. Xu, Austin, TX (US);
Michael P. C. Watts, Austin, TX (US);
Nicholas A. Stacey, Austin, TX (US);
Frank Y. Xu, Austin, TX (US);
Michael P. C. Watts, Austin, TX (US);
Nicholas A. Stacey, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Board of Regents, The University of Texas, Austin, TX (US);
Abstract
The present invention is directed to a material for use in imprint lithography that features a composition having a viscosity associated therewith and including a surfactant, a polymerizable component, and an initiator responsive to a stimuli to vary the viscosity in response thereto, with the composition, in a liquid state, having the viscosity being lower than about 100 centipoises, a vapor pressure of less than about 20 Torr, and in a solid cured state a tensile modulus of greater than about 100 MPa, a break stress of greater than about 3 MPa and an elongation at break of greater than about 2%.