The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2011
Filed:
Jun. 01, 2004
Jeffrey J. Spiegelman, San Diego, CA (US);
Daniel Alvarez, Jr., San Diego, CA (US);
Russell J. Holmes, Santee, CA (US);
Allan Tram, San Diego, CA (US);
Jeffrey J. Spiegelman, San Diego, CA (US);
Daniel Alvarez, Jr., San Diego, CA (US);
Russell J. Holmes, Santee, CA (US);
Allan Tram, San Diego, CA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.