The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2011
Filed:
Dec. 27, 2006
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Derk Jan Wilfred Klunder, Geldrop, NL;
Wouter Anthon Soer, Nijmegen, NL;
Kurt Gielissen, Meeuwen, BE;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Derk Jan Wilfred Klunder, Geldrop, NL;
Wouter Anthon Soer, Nijmegen, NL;
Kurt Gielissen, Meeuwen, BE;
ASML Netherlands B.V., Veldhoven, NL;
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
A debris mitigation system for trapping contaminant material coming from a debris-generating radiation source. The system includes a contamination barrier constructed and arranged to rotate about an axis, and a magnet structure constructed and arranged to provide a magnetic field for deflecting charged debris from the radiation source. The magnet structure is constructed and arranged to provide a magnetic field through the contamination barrier. The magnetic field, when passing through the contamination barrier, is oriented along planes generally coinciding with the axis of rotation of the contamination barrier.