The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 06, 2011

Filed:

Feb. 23, 2009
Applicants:

Ichiki Takemoto, Kawanishi, JP;

Nobuo Ando, Toyonaka, JP;

Inventors:

Ichiki Takemoto, Kawanishi, JP;

Nobuo Ando, Toyonaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/004 (2006.01); C07C 69/74 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a polyhydric compound represented by the formula (I): wherein Rto Reach independently represent a hydrogen atom etc., at least one selected from the group consisting of Rto Ris a group represented by the formula (II): wherein Qand Qeach independently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., and Arepresents an organic counter ion, andthe others are hydrogen atoms or groups represented by the formula (III): wherein Xto Xeach independently represent a hydrogen atom etc., n represents an integer of 0 to 3, W represents any one of the following groups: Zrepresents a C1-C6 alkyl group etc., and ring Y represents a C3-C20 alicyclic hydrocarbon group, anda chemically amplified resist composition containing the same.


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