The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2011
Filed:
Oct. 06, 2010
Heiko Feldmann, Aalen, DE;
Susanne Beder, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Alexander Epple, Aalen, DE;
Hans-juergen Rostalski, Oberkochen, DE;
Heiko Feldmann, Aalen, DE;
Susanne Beder, Aalen, DE;
Aurelian Dodoc, Heidenheim, DE;
Alexander Epple, Aalen, DE;
Hans-Juergen Rostalski, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
In some embodiments, a projection objective for lithography includes an optical arrangement of optical elements between an object plane and an image plane. The arrangement generally has at least one intermediate image plane, the arrangement further having at least two correction elements for correcting aberrations, of which a first correction element is arranged optically at least in the vicinity of a pupil plane and a second correction element is arranged in a region which is not optically near either a pupil plane or a field plane.