The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2011
Filed:
Apr. 29, 2009
Masaki Haneda, Kawasaki, JP;
Noriyoshi Shimizu, Kawasaki, JP;
Nobuyuki Ohtsuka, Kawasaki, JP;
Yoshiyuki Nakao, Kawasaki, JP;
Michie Sunayama, Kawasaki, JP;
Takahiro Tabira, Kawasaki, JP;
Masaki Haneda, Kawasaki, JP;
Noriyoshi Shimizu, Kawasaki, JP;
Nobuyuki Ohtsuka, Kawasaki, JP;
Yoshiyuki Nakao, Kawasaki, JP;
Michie Sunayama, Kawasaki, JP;
Takahiro Tabira, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
A semiconductor device includes an insulating film including oxygen formed over a semiconductor substrate, a recess formed in the insulating film, a refractory metal film formed on the inner wall of the recess, a metal film including copper, manganese, and nitrogen formed on the refractory metal film, and a copper film formed on the metal film to fill in the recess.