The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2011
Filed:
Mar. 24, 2006
Applicant:
Takashi Kawahito, Fujsawa, JP;
Inventor:
Takashi Kawahito, Fujsawa, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01L 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An environment holding apparatus includes: a first chamber that has an opening and holds a sample; a moving stage that is two-dimensionally moved with the first chamber being mounted thereon; and a first plane that includes an introduction port having a function of introducing gas adjusted to predetermined conditions into the first chamber from a pipe, and that is provided so as to cover the opening of the first chamber. The first plane is provided so as to be kept stationary regardless of a movement of the moving stage and the opening of the first chamber is two-dimensionally moved along the first plane by the movement of the moving stage.