The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Dec. 22, 2009
Dirk Preikszas, Oberkochen, DE;
Michael Steigerwald, Westhausen, DE;
Daniel Tobias, Jena, DE;
Andreas Eisele, Munich, DE;
Momme Mommsen, Aalen, DE;
Dietmar Doenitz, Aalen, DE;
Christian Hendrich, Aalen, DE;
Dirk Preikszas, Oberkochen, DE;
Michael Steigerwald, Westhausen, DE;
Daniel Tobias, Jena, DE;
Andreas Eisele, Munich, DE;
Momme Mommsen, Aalen, DE;
Dietmar Doenitz, Aalen, DE;
Christian Hendrich, Aalen, DE;
Carl Zeiss NTS GmbH, Oberkochen, DE;
Abstract
A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in operation passes through the pole plates, wherein trenches are provided in the pole plates, in which trenches coil wires are arranged. The trenches, when viewed in a cross section transverse to an extension direction of the trenches, have a smaller width in a region of a surface of the pole plates, than in a region arranged at a distance from the surface.