The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
May. 01, 2009
Satoshi Shinachi, Joetsu, JP;
Tsunehiro Nishi, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Satoshi Shinachi, Joetsu, JP;
Tsunehiro Nishi, Joetsu, JP;
Koji Hasegawa, Joetsu, JP;
Takeshi Kinsho, Joetsu, JP;
Seiichiro Tachibana, Joetsu, JP;
Takeru Watanabe, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
Carboxyl-containing lactone compounds having formula (1) are novel wherein Ris H, F, methyl or trifluoromethyl, Rand Rare H or monovalent hydrocarbon groups, or Rand Rmay together form an aliphatic ring, W is CH, O or S, kis an integer of 0 to 4, and kis 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent properties including resolution, LER, pattern density dependency and exposure margin.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile