The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 22, 2011
Filed:
Jun. 30, 2005
Vlasta Brusic, Geneva, IL (US);
Richard Jon Jenkins, Warrenville, IL (US);
Christopher C. Thompson, Earlville, IL (US);
Vlasta Brusic, Geneva, IL (US);
Richard Jon Jenkins, Warrenville, IL (US);
Christopher C. Thompson, Earlville, IL (US);
Cabot Microelectronics Corporation, Aurora, IL (US);
Abstract
The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.