The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 2011
Filed:
Nov. 11, 2008
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Joost DE Pee, Veldhoven, NL;
Cornelius Adrianus Lambertus DE Hoon, Best, NL;
Stijn Boschker, Pijnacker, NL;
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Joost De Pee, Veldhoven, NL;
Cornelius Adrianus Lambertus De Hoon, Best, NL;
Stijn Boschker, Pijnacker, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.