The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Jun. 30, 2008
Min Zheng, Milpitas, CA (US);
Min LI, Dublin, CA (US);
Chen-jung Chien, Sunnyvale, CA (US);
Kowang Liu, Fremont, CA (US);
Sung Chung, Campbell, CA (US);
Min Zheng, Milpitas, CA (US);
Min Li, Dublin, CA (US);
Chen-Jung Chien, Sunnyvale, CA (US);
Kowang Liu, Fremont, CA (US);
Sung Chung, Campbell, CA (US);
Headway Technologies, Inc., Milpitas, CA (US);
Abstract
A dynamic fly heater (DFH) for improved lifetime and better film uniformity is disclosed for a magnetic head. The heater has a lower amorphous Ta layer and an upper W layer to promote small grain size and reduced electro-migration. The composite film is especially advantageous for heaters greater than 1000 Angstroms thick where dR/R is difficult to control in the prior art. The DFH may be a (Ta/W)laminate in which the Ta layers are about 30 Angstroms thick and the combined thickness of the W layers is from 400 to 1200 Angstroms. A Ta film is preferably sputter deposited with an Ar pressure of 3 to 5 mTorr and the W film is sputter deposited in the same chamber with a 3 to 20 mTorr Ar pressure. In one embodiment, a merged read/write head has one DFH in the read head and a second DFH in the write head.