The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2011
Filed:
Nov. 12, 2009
Shigeki Nishina, Miyagi, JP;
Motoki Imamura, Miyagi, JP;
Shigeki Nishina, Miyagi, JP;
Motoki Imamura, Miyagi, JP;
Advantest Corporation, Tokyo, JP;
Abstract
A desired spatial resolution upon a measurement can be attained by making an electromagnetic wave including a terahertz wave (frequency thereof is equal to or more than 0.01 [THz], and equal to or less than 100 [THz]) incident to a device under test. An electromagnetic wave measurement device includes an incident lens which makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] incident to a device under a test while decreasing a beam diameter of the electromagnetic wave to be measured, a scanning stage which rotates, about a line orthogonal to an optical axis of the incident lens as a rotational axis, the device under the test or the optical axis, and an electromagnetic wave detector which detects the electromagnetic wave to be measured which has transmitted through the device under the test, where a coordinate on the optical axis of a position which gives the minimum value d of the beam diameter is different from a coordinate on the optical axis of the rotational axis.