Method of manufacturing an electrostatic chuck

Abstract

Provided is a method of manufacturing a gas supply structure for use in an electrostatic chuck apparatus having an electrostatic chuck on the upper surface side of a metal base (), the gas supply structure being capable of eliminating contamination due to nonuniform cooling gas jetting quantities and deposition of a thermally spraying material and the like. The method of manufacturing the gas supply structure for supplying a cooling gas supplied from the lower surface side of the metal base () to the back surface of a substrate (W) attracted to an upper insulating layer () side, through a gas supply path () provided on the metal base (), the method including: prior to a step of forming a lower insulating layer () by thermally spraying a ceramic powder on the upper surface side of the metal base (), a step of forming an attracting electrode (), and a step of forming the upper insulating layer (), a step of blocking a gas supply path outlet () on the upper surface side of the metal base () with an adhesive (), the adhesive containing a filler made of the same material as that of the ceramic powder that is used for forming the lower insulating layer (); and a step of opening a hole toward the gas supply path outlet () of the metal base () after forming the upper insulating layer (), to thereby form a through hole () reaching the gas supply path ().