The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Mar. 07, 2007
Chang Yung Cheng, Tainan, TW;
Hsueh-shih Fu, Hsin-Chu County, TW;
Ying-lang Wang, Tai-Chung County, TW;
Chin-kun Wang, Hsin-Chu, TW;
Chang Yung Cheng, Tainan, TW;
Hsueh-Shih Fu, Hsin-Chu County, TW;
Ying-Lang Wang, Tai-Chung County, TW;
Chin-Kun Wang, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
Aspects of the present disclosure provide a method and a system for providing a selection of golden tools for better defect density and product yield. A golden tool selection and dispatching system is provided to integrate different components for robust golden tool selection and dispatching. The golden tool selection system selects a set of golden tools based on performance of a set of manufacturing tools and provides a fully automated operational environment to produce a product using the set of golden tools.