The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jul. 22, 2009
Kenji Kobayashi, Tokyo, JP;
Takahisa Yoshioka, Tokyo, JP;
Takeshi Takano, Tokyo, JP;
Lintec Corporation, Tokyo, JP;
Abstract
A sheet peeling apparatusincludes: a supporting meansfor supporting a semiconductor wafer W stuck with an adhesive sheet S; a tape sticking meansfor sticking a peeling tape T to the adhesive sheet S; a pulling meansfor pulling the peeling tape T; a peeling assisting meansincluding an endless memberwhich is positioned on the adhesive sheet S, and wound on a guide member; and a sandwiching meansfor sandwiching the adhesive sheet S between the endless memberand the sandwiching means. In the sheet peeling apparatus, the adhesive sheet S is peeled off due to the relative movement of the pulling meansand the supporting meansin a state that the adhesive sheet S is sandwiched between the peeling assisting meansand the sandwiching means