The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Feb. 19, 2010
Jennifer Y. Sun, Sunnyvale, CA (US);
Ren-guan Duan, San Jose, CA (US);
Jie Yuan, San Jose, CA (US);
LI Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Jennifer Y. Sun, Sunnyvale, CA (US);
Ren-Guan Duan, San Jose, CA (US);
Jie Yuan, San Jose, CA (US);
Li Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. In a first embodiment, the ceramic article includes ceramic which is formed from yttrium oxide at a molar concentration ranging from about 90 mole % to about 70 mole %, and zirconium oxide at a molar concentration ranging from about 10 mole % to about 30 mole %. In a second embodiment, the ceramic article includes ceramic which is formed from zirconium oxide at a molar concentration ranging from about 96 mole % to about 94 mole %, and yttrium oxide at a molar concentration ranging from about 4 mole % to about 6 mole %.