The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Mar. 21, 2006
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Hung T. Nguyen, Fremont, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Hung T. Nguyen, Fremont, CA (US);
Wendell T. Blonigan, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A transfer chamber for a substrate processing tool includes a main body having side walls adapted to couple to at least one processing chamber and at least one load lock chamber. The main body houses at least a portion of a robot adapted to transport a substrate between the processing chamber and the load lock chamber. A lid couples to and seals a top of the main body of the transfer chamber. The transfer chamber also has a domed bottom adapted to couple to and to seal a bottom portion of the main body of the transfer chamber.