The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Aug. 29, 2008
Takeshi Oono, Kudamatsu, JP;
Kenji Nakata, Hikari, JP;
Shoji Okiguchi, Kudamatsu, JP;
Tooru Ueno, Shunan, JP;
Hidehiro Oomae, Hikari, JP;
Shigeharu Minami, Kudamatsu, JP;
Yoshitaka Kai, Kudamatsu, JP;
Takeshi Oono, Kudamatsu, JP;
Kenji Nakata, Hikari, JP;
Shoji Okiguchi, Kudamatsu, JP;
Tooru Ueno, Shunan, JP;
Hidehiro Oomae, Hikari, JP;
Shigeharu Minami, Kudamatsu, JP;
Yoshitaka Kai, Kudamatsu, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.