The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Jul. 22, 2009
Yi Feng Lee, Gueishan Township, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-zong Tian, Shihgang Township, Taichung County, TW;
Wei Jun Chen, Shalu Township, Taichung County, TW;
Tsung-wei Lin, Taoyuan, TW;
Yi Feng Lee, Gueishan Township, Taoyuan County, TW;
Chun Chi Chen, Taipei, TW;
Yun-Zong Tian, Shihgang Township, Taichung County, TW;
Wei Jun Chen, Shalu Township, Taichung County, TW;
Tsung-Wei Lin, Taoyuan, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A method for finding the correlation between tool PM (prevention maintenance) and the product yield of the tool is disclosed. The method uses a moving average method to magnify a curve trend that is formed by the product yield data that is captured during a predetermined days before PM and after PM. The magnified curve trend is shown by a Cumulative sum chart. The Cumulative sum chart is analyzed for informing related workers of the effect between the tool PM and the product yield, so as to accurately estimate PM timing. Thereby, via the method, the effect between the tool PM and the product yield may be determined, which serves as an important reference for workers to execute further PM.